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Micromechanics and nanoscale effects : MEMS, multi-scale matrials [sic] and micro-flows / edited by Vasyl Michael Harik and Li-Shi Luo - xv, 240 páginas : ilustraciones - ICASE/LaRC interdisciplinary series in science and engineering ; v. 10 .

ISBN: 1402019688 (alk. paper)

Subjects--Topical Terms:
Microelectrónica
Sistemas microelectromecánicos
Actuadores

LC Class. No.: TK7874 / M529

Dewey Class. No.: 621.381