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Materials, technology, and reliability for advanced interconnects and low-k dielectrics--2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A / editors, R. J. Carter ... [y otros.] - xiii, 402 páginas : ilustraciones - Materials research society symposium proceedings 812 . - Materials Research Society symposium proceedings .

"This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii

ISBN: 1558997628

Subjects--Topical Terms:
Semiconductores--Materiales--Congresos
Semiconductores--Uniones--Congresos
Películas dieléctricas--Congresos
Circuitos integrados--Materiales--Congresos
Circuitos integrados--Confiabilidad--Congresos

LC Class. No.: TK7871.85 / M38 2004

Dewey Class. No.: 621.8/672