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Journal of vacuum science & technology. B, Microelectronics processing and phenomena Journal of vacuum science and technology. B, Microelectronics processing and phenomena Microelectronics processing and phenomena

Titulo de la cubierta Inicia en 1983 con el vol. 1, no. 1, cierra en 1990 con el vol. 8, no. 6

Current physics index Chemical abstracts Engineering index Current contents Science abstracts Physics abstracts Coal abstracts Metals abstracts



ISSN: 0734-211X = Journal of vacuum science & technology. B, Microelectronics processing and phenomena = J. vac. sci. technol., B Microelectron. process. phenom.

CODEN: JVTBD9

Subjects--Topical Terms:
Tecnología del vacío.

LC Class. No.: TJ940

Dewey Class. No.: 621.5