The preparation characterization and tribological properties of TA-C:H deposited using an electron cyclotron wave resonance plasma beam source.
Morrison, N.A. Muhl, S. Rodil, S.E. Ferrari, A.C. Nesladek, M. Milne, W.I. Robertson, J.
The preparation characterization and tribological properties of TA-C:H deposited using an electron cyclotron wave resonance plasma beam source. - 1999. - Vol. 172, no.1, pp. 79-90. = Physica Status Solidi A: Applications and Materials Science
The preparation characterization and tribological properties of TA-C:H deposited using an electron cyclotron wave resonance plasma beam source. - 1999. - Vol. 172, no.1, pp. 79-90. = Physica Status Solidi A: Applications and Materials Science