Vista normal Vista MARC Vista ISBD

Andrade, E. Mahmood, A. Muhl, S. Zavala, E.P. Pineda, J.C. Huerta, L.

Ion beam analysis of SiC/sub x/ thin films using a deuterium beam. - 2002. - Vol. 153, pp. 119-124. = Surface and Coatings Technology

Subjects--Facted Index Terms:
Silicon carbide
Thin film RF
RBS
NRA
Characterization films