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Ortiz, A. Alonso, J.C. Haro-Poniatowski, E.

Spray deposition and characterization of zirconium-oxide thin films. - 2005. - Vol. 34, no. 2, pp. 150-155. = Journal of Electronic Materials

Subjects--Facted Index Terms:
Thin Film
Oxide
Pyrosol process
Insulator