Optical and morphological properties of SiNx/Si amorphous multilayer structures grown by Plasma Enhanced Chemical Vapor Deposition.
Santana, G. de Melo, O. Aguilar-Hernandez, J. Monroy, B. M. Fandiño, J. Cruz, F. Ortiz, A. Contreras-Puente, G. Alonso, J. C.
Optical and morphological properties of SiNx/Si amorphous multilayer structures grown by Plasma Enhanced Chemical Vapor Deposition. - 2005. - Vol. 2, no. 10, pp. 3698-3701. = Physica Status Solidi C: Current Topics in Solid State Physics
Optical and morphological properties of SiNx/Si amorphous multilayer structures grown by Plasma Enhanced Chemical Vapor Deposition. - 2005. - Vol. 2, no. 10, pp. 3698-3701. = Physica Status Solidi C: Current Topics in Solid State Physics