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Bizarro, M. Alonso, J. C. Ortiz, A.

ZrAlO ternary oxide as a candidate for high-k dielectrics. - 2006. - Vol. 9, no. 6, pp. 1090-1096. = Materials Science In Semiconductor Processing

Subjects--Facted Index Terms:
High-k dielectrics
Pyrosol process
Oxides