Fluorine content of SiOF films as determined by IR spectroscopy and resonant nuclear reaction analysis.
Alonso, J. C. Diaz-Bucio, M. Ortiz, A. Benami, A. Cheang-Wong, J. C. Rodriguez-Fernandez, L.
Fluorine content of SiOF films as determined by IR spectroscopy and resonant nuclear reaction analysis. - 2007. - Vol. 25, no. 3, pp. 448-454. = Journal of Vacuum Science & Technology A
Fluorine content of SiOF films as determined by IR spectroscopy and resonant nuclear reaction analysis. - 2007. - Vol. 25, no. 3, pp. 448-454. = Journal of Vacuum Science & Technology A