Vista normal Vista MARC Vista ISBD

Lopez, W. Muhl, S. Rodil, S.E.

The preparation of permalloy 80/20 thin films using a pulsed DC discharge in a hollow cathode. - 2009. - Vol. 83, no. 5, pp. 819-823. = Vacuum

Subjects--Facted Index Terms:
Hollow cathode
Permalloy
Sputtering
Pulsed DC