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Alonso, J. C. Pulgarin, F. A. Monroy, B. M. Benami, A. Bizarro, M. Ortiz, A.

Visible electroluminescence from silicon nanoclusters embedded in chlorinated silicon nitride thin films. - 2010. - Vol. 518, no. 14, pp. 3891-3893. = Thin Solid Films

Subjects--Facted Index Terms:
Silicon
Silicon nitride
Nanostructures
Luminescence
Plasma processing and deposition