Low interface states and high dielectric constant Y2O3 films on Si substrates.
Alarcon-Flores, G. Aguilar-Frutis, M. Falcony, C. Garcia-Hipolito, M. Araiza-Ibarra, J. J. Herrera-Suarez, H. J.
Low interface states and high dielectric constant Y2O3 films on Si substrates. - 2006. - Vol. 24, no. 4, pp. 1873-1877. = Journal of Vacuum Science and Technology B
Low interface states and high dielectric constant Y2O3 films on Si substrates. - 2006. - Vol. 24, no. 4, pp. 1873-1877. = Journal of Vacuum Science and Technology B