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Alvarez-Macias, C. Monroy, B. M. Huerta, L. Canseco-Martinez, M. A. Picquart, M. Santoyo-Salazar, J. Garcia Sanchez, M. F. Santana, G.

Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane - 2013 - Vol. 285, pp. 431-439 = Applied Surface Science

Subjects--Topical Terms:
Polymorphous silicon
Dichlorosilane
PECVD
Nanocrystals
AFM
RamanXPS
FTIR