Vista normal Vista MARC Vista ISBD

Sherman, Arthur,

Chemical vapor deposition for microelectronics : Principles, technology, and applications / By Arthur sherman - 215 páginas - Materials science and process technology series .

ISBN: 0815511361

Subjects--Topical Terms:
Deposito de materiales al vacio
Circuitos integrados--Diseño y construcción

LC Class. No.: TS695 / S44