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Rimini, Emanuele,

Ion implantation : basics to device fabrication / by Emanuele Rimini - xii, 393 páginas : ilustraciones ; - Kluwer international series in engineering and computer science ; SECS 293. Klumer international series in engineering and computer science. .

Includes bibliographical references (p. [359]-378) and index.

ISBN: 0792395204 (papel libre de acido)

Subjects--Topical Terms:
Implantación de iones
Dopado de semiconductores
Semiconductores--Diseño y construcción

LC Class. No.: QC702.7I55 / R55 1995

Dewey Class. No.: 621.3815/2