Micromechanics and nanoscale effects :  MEMS, multi-scale matrials [sic] and micro-flows / 
edited by Vasyl Michael Harik and Li-Shi Luo 
 - xv, 240 páginas :  ilustraciones 
 - ICASE/LaRC interdisciplinary series in science and engineering ;  v. 10 .
<br/><br/><label>ISBN: </label>1402019688 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectrónica<br/>Sistemas microelectromecánicos<br/>Actuadores
<br/><br/><label>LC Class. No.: </label>TK7874  / M529 
<br/><br/><label>Dewey Class. No.: </label>621.381