TY  - BOOK
AU  - Harik,Vasyl Michael
AU  - Luo,Li-Shi
TI  - Micromechanics and nanoscale effects: MEMS, multi-scale matrials [sic] and micro-flows 
T2  - ICASE/LaRC interdisciplinary series in science and engineering
SN  - 1402019688 (alk. paper)
AV  - TK7874 M529
U1  - 621.381 22
PY  - 2004///
CY  - Dordrecht
PB  - Kluwer Academic
KW  - Microelectrónica
KW  - Sistemas microelectromecánicos
KW  - Actuadores
ER  -