TY  - BOOK
AU  - Seiler,David G.
ED  - International Conference on Characterization and Metrology for ULSI Technology
TI  - Characterization and metrology for ULSI technology: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 
T2  - AIP conference proceedings
SN  - 0735401527
AV  - TK7874.76 C43 2003
PY  - 2003///
CY  - Melville, New York
PB  - American Institute of Physics
KW  - Circuitos integrados
KW  - Ultra integración a gran escala
KW  - Congresos
KW  - Software
ER  -