TY  - BOOK
AU  - Carter,Richard John
ED  - Materials Research Society.
ED  - Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
TI  - Materials, technology, and reliability for advanced interconnects and low-k dielectrics--2004: symposium held April 13-15, 2004, San Francisco, California, U.S.A 
T2  - Materials research society symposium proceedings
SN  - 1558997628
AV  - TK7871.85 M38 2004
U1  - 621.8/672 22
PY  - 2004///
CY  - Warrendale, Pennsylvania
PB  - Materials research society
KW  - Semiconductores
KW  - Materiales
KW  - Congresos
KW  - Uniones
KW  - Películas dieléctricas
KW  - Circuitos integrados
KW  - Confiabilidad
N1  - "This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii
ER  -