TY  - BOOK
AU  - Perevostchikov,Viktor A.
AU  - Skupov,Vladimir Dmitrievich
AU  - Gloumov,Victor
TI  - Gettering defects in semiconductors
T2  - Springer series in advanced microelectronics,
SN  - 354026244X
AV  - QC611.6D4 P4713
U1  - 621.3815/2 22
PY  - 2005///
CY  - Berlin
PB  - Springer Verlag
KW  - Semiconductores
KW  - Defectos
KW  - Materiales
N1  - Traducción de: Getterirovanie primeseæi i defektov v poluprovodnikakh
ER  -