TY  - BOOK
AU  - Pichler,Peter
TI  - Intrinsic point defects, impurities, and their diffusion in silicon
T2  - Computational microelectronics
SN  - 3211206876 (empastado)
AV  - TK7871.15S55 P53
PY  - 2004///
CY  - Wien
PB  - Springer Verlag
KW  - Cristales de silicio
KW  - Defectos
KW  - Semiconductores
KW  - Difusión
ER  -