TY - BOOK AU - Ostrikov,Kostya TI - Plasma nanoscience: basic concepts and applications of deterministic nanofabrication SN - 9783527407408 AV - TA418.9N35 O78 PY - 2008/// CY - Weinheim PB - Wiley-VCH KW - Materiales nanoestructurados KW - IngenierĂ­a del plasma KW - Plasmas a bajas temperaturas ER -