TY - BOOK AU - Zhou,Guangya AU - Lee,Chengkuo TI - Optical MEMS, nanophotonics, and their applications T2 - Series in optics and optoelectronics SN - 9781498741330 AV - TK8360.O68 O67 U1 - 621.36/5 23 PY - 2018///] CY - Boca Raton, FL PB - CRC Press KW - MEMS ópticos KW - Nanofotónica ER -