TY  - SER
ED  - American Vacuum Society
ED  - American Institute of Physics
TI  - Journal of vacuum science & technology. B, Microelectronics processing and phenomena
SN  - 0734-211X
AV  - TJ940 
U1  - 621.5 
PY  - 1983///-1990
CY  - New York, N.Y.
PB  - American Institute of Physics
KW  - Tecnología del vacío
N1  - Titulo de la cubierta; Inicia en 1983 con el vol. 1, no. 1, cierra en 1990 con el vol. 8, no. 6; Current physics index; Chemical abstracts; Engineering index; Current contents; Science abstracts; Physics abstracts; Coal abstracts; Metals abstracts; Tambien publicada en micropelicula
ER  -