Mendez, J.M. Ramirez, E. Gaona-Couto, A. <br/><br/>
Influence of the sputtering gas composition on the properties of thin boron nitride thin films. 

 -  1998. 
 - Vol. 7, no. 8, pp. 1184-1189. 
 = Diamond and Related Materials 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>Boron nitride<br/>Sputtering<br/>D.c. bias<br/>FTIR