TY  - BOOK
AU  - Mendez, J.M.
AU  - Ramirez, E.
AU  - Gaona-Couto, A.
ED  - Universidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales
TI  - Influence of the sputtering gas composition on the properties of thin boron nitride thin films
PB  - 1998.
KW  - Boron nitride
KW  - Sputtering
KW  - D.c. bias
KW  - FTIR
UR  - https://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/1998-56.pdf
ER  -