Andrade, E. Mahmood, A. Muhl, S. Zavala, E.P. Pineda, J.C. Huerta, L. <br/><br/>
Ion beam analysis of SiC/sub x/ thin films using a deuterium beam. 

 -  2002. 
 - Vol. 153, pp. 119-124. 
 = Surface and Coatings Technology 
<br/><br/><label>Subjects--Facted Index Terms: </label><br/>Silicon carbide<br/>Thin film RF<br/>RBS<br/>NRA<br/>Characterization films