TY  - BOOK
AU  - Fandino, J.
AU  - Santana, G.
AU  - Rodriguez-Fernandez, L.
AU  - Cheang-Wong, J.C.
AU  - Ortiz, A.
AU  - Alonso, J.C
ED  - Universidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales
ED  - Universidad Nacional Autonoma de Mexico. Instituto de Fisica
TI  - Role of hydrogen on the deposition and properties of fluorinated silicon-nitride films prepared by inductively coupled plasma enhanced chemical vapor deposition using SiF4/N-2/H-2 mixtures
PB  - 2005.
UR  - https://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/2005-47.pdf
ER  -