Alonso, J. C. Pulgarin, F. A. Monroy, B. M. Benami, A. Bizarro, M. Ortiz, A.

Visible electroluminescence from silicon nanoclusters embedded in chlorinated silicon nitride thin films. - 2010. - Vol. 518, no. 14, pp. 3891-3893. = Thin Solid Films


Silicon
Silicon nitride
Nanostructures
Luminescence
Plasma processing and deposition