Gomez-Gonzalez, L. A. Dutt, A. Monroy, B. M. Escobar-Carrasquilla, J. D. Santana, G. Alvarez-Macias, C. Ponce, A. <br/><br/>
Size distribution and visible luminescence of silicon nanoparticles embedded in SiNx thin film: role of RF power in PECVD 

 -  2017 
 - Vol. 10, No. 3, Art. 1750014 
 = Functional Materials Letters 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical vapor deposition<br/>Nanoparticles<br/>Electron microscopy<br/>Photoluminescence<br/>FTIR