Methods and materials in microelectronic technology / 
Ed. by joachim bargon 
 - 367 páginas 
 - The ibm research symposia series .
<br/><br/> "proceedings of the international symposium on methods and materials in microelectronic technology, held september 29-october 1, 1982 in bad navenahr, federal republic of germany" 
<br/><br/><label>ISBN: </label>0306418037 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fotolitografía--Congresos<br/>Litografía por rayos X--Congresos<br/>Litografia por haz ionico--Congresos<br/>Circuitos integrados de muy alta escala de integracion--Diseño y construccion--Congresos
<br/><br/><label>LC Class. No.: </label>TK7874  / I574 1982