Sherman, Arthur, <br/><br/>
Chemical vapor deposition for microelectronics :  Principles, technology, and applications / 
By Arthur sherman 
 - 215 páginas 
 - Materials science and process technology series .
<br/><br/><label>ISBN: </label>0815511361 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Deposito de materiales al vacio<br/>Circuitos integrados--Diseño y construcción
<br/><br/><label>LC Class. No.: </label>TS695  / S44