TY  - BOOK
AU  - Sherman, Arthur,
TI  - Chemical vapor deposition for microelectronics: Principles, technology, and applications 
T2  - Materials science and process technology series
SN  - 0815511361
AV  - TS695 S44
PY  - 1987///
CY  - Park ridge, new jersey
PB  - Noyes
KW  - Deposito de materiales al vacio
KW  - Circuitos integrados
KW  - Diseño y construcción
ER  -