Rapid thermal processing :  Science and technology / 
Ed. by Richard b. fair 
 - 430 páginas 
<br/><br/><label>ISBN: </label>0122476905 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductores--Tratamiento térmico<br/>Semiconductores impuros
<br/><br/><label>LC Class. No.: </label>TK7871.85  / R366