Middleman, Stanley, <br/><br/>
Process engineering analysis in semiconductor device fabrication / 
Stanley Middleman, Arthur K. Hochberg 
 - xvii, 774 páginas 
 - McGraw-Hill chemical engineering series .
<br/><br/><label>ISBN: </label>0070418535 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductores--Diseño y construcción
<br/><br/><label>LC Class. No.: </label>TK7871.85  / M533