TY  - BOOK
AU  - Ito, Hiroshi
AU  - Tagawa, Seiichi,
AU  - Horie, Kazuyuki,
ED  - Kobunshi Gakkai (Japon).
ED  - American Chemical Society.
TI  - Polymeric materials for microelectronic applications: science and technology 
T2  - ACS symposium series
SN  - 0841230552
AV  - TK7871.15P6 P63
PY  - 1994///
CY  - Washington, D.C.
PB  - American Chemical Society
KW  - Microelectronica
KW  - Materiales
KW  - Congresos
KW  - Polímeros
N1  - "Developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, atthe polymers for microelectronics 1993 meeting, Kawasaki, Japan, November 15-19, 1993"
ER  -