Advanced metallization for ULSI applications in 1993 :  proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / 
ed., David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike 
 - 611 páginas 
 - Materials research society conference proceedings .
<br/><br/><label>ISBN: </label>1558992359 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuitos integrados--Ultra integración a gran escala--Materiales--Congresos<br/>Películas metálicas--Congresos<br/>Deposicion en fase de vapor--Congresos<br/>Metalización electroquímica--Congresos
<br/><br/><label>LC Class. No.: </label>TK7871.15F5  / A38