TY  - BOOK
AU  - Blumenthal, Roc,
AU  - Janssen, Guido,
ED  - University of California, Berkeley.
ED  - Advanced Metallization for ULSI Applications Conference
TI  - Advanced metallization for ULSI applications for 1994: proceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. 
T2  - Materials Research Society conference proceedings
SN  - 1558992790
AV  - TK7874.76 A38
PY  - 1995///
CY  - Pittsburgh, Pennsylvania
PB  - Materials Research Society
KW  - Circuitos integrados
KW  - Ultra integración a gran escala
KW  - Materiales
KW  - Congresos
KW  - Galvanoplastia al vapor
KW  - Metalización electroquímica
N1  - Documentos presentados en la Advanced Metallization for ULSI Application Conference--Pref
ER  -