000 01058nam a2200313zi 4500
003 $$aOCoLC
005 20230621111034.0
008 040423c 2004ne a 000 0 eng
020 _a1402019688 (alk. paper)
035 _aMX001000993834
040 _aDLC
_bspa
_cDLC
_dYDX
_dUNAMX
041 _aENG
050 0 0 _aTK7874
_bM529
082 0 0 _a621.381
_222
084 _aGeneral
245 0 0 _aMicromechanics and nanoscale effects :
_bMEMS, multi-scale matrials [sic] and micro-flows /
_cedited by Vasyl Michael Harik and Li-Shi Luo
264 1 _aDordrecht :
_bKluwer Academic,
_cc2004
300 _axv, 240 páginas :
_bilustraciones
490 0 _aICASE/LaRC interdisciplinary series in science and engineering ;
_vv. 10
650 0 _aMicroelectrónica
650 0 _aSistemas microelectromecánicos
650 0 _aActuadores
700 1 _aHarik, Vasyl Michael,
_eeditor
700 1 _aLuo, Li-Shi,
_eeditor
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c12269
_d12269