000			01845nam a2200349zi 4500
005			20230621111058.0
008			060620s2004 xxua b 101 0 eng d
020			_a1558997628
035			_aMX001001069595
040			_aLHL _bspa _cLHL _dOCLCQ _dDLC _dUNAMX
050		4	_aTK7871.85 _bM38 2004
082	0	0	_a621.8/672 _222
084			_aGeneral y Serie
245	0	0	_aMaterials, technology, and reliability for advanced interconnects and low-k dielectrics--2004 : _bsymposium held April 13-15, 2004, San Francisco, California, U.S.A / _ceditors, R. J. Carter ... [y otros.]
264		1	_aWarrendale, Pennsylvania : _bMaterials research society, _cc2004
300			_axiii, 402 páginas : _bilustraciones
490	0		_aMaterials research society symposium proceedings _v812
500			_a"This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii
650		4	_aSemiconductores _xMateriales _vCongresos
650		4	_aSemiconductores _xUniones _vCongresos
650		4	_aPelículas dieléctricas _vCongresos
650		4	_aCircuitos integrados _xMateriales _vCongresos
650		4	_aCircuitos integrados _xConfiabilidad _vCongresos
700	1		_aCarter, Richard John, _d1948- , _eeditor
710	2		_aMaterials Research Society. _bMeeting _d(2004 : _cSan Francisco, California)
711	2		_aSymposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics _d(2004 : _cSan Francisco, California)
830			_aMaterials Research Society symposium proceedings _x 0272-9172
336			_atexto _2rdacontent
337			_asin medio _2rdamedia
338			_avolumen _2rdacarrier
999			_c13020 _d13020