| 000 | 01002nam a2200289zi 4500 | ||
|---|---|---|---|
| 005 | 20230621111142.0 | ||
| 008 | 100126s2007 enka 000 0 eng | ||
| 020 | _a9780470018934 | ||
| 020 | _a0470018933 | ||
| 020 | _a9780470727300 (rústica) | ||
| 020 | _a0470727306 (rústica) | ||
| 035 | _aMX001001199041 | ||
| 040 |
_aDLC _bspa _cDLC _dYDX _dBTCTA _dBAKER _dYDXCP _dUKM _dDLC _dUNAMX |
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| 050 | 0 | 0 |
_aTK7874 _bM167 |
| 082 | 0 | 0 |
_a621.3815/31 _222 |
| 084 | _aGeneral | ||
| 100 | 1 |
_aMack, Chris A, _eautor |
|
| 245 | 1 | 0 |
_aFundamental principles of optical lithography : _bthe science of microfabrication / _cChris Mack |
| 264 | 1 |
_aChichester, West Sussex, England : _bWiley, _cc2007 |
|
| 300 |
_axvii, 515 páginas : _bilustraciones |
||
| 650 | 0 |
_aCircuitos integrados _xDiseño y construcción |
|
| 650 | 0 |
_aMicrolitografía _xAplicaciones industriales |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 999 |
_c14373 _d14373 |
||