| 000 | 01066nam a2200337 a 4500 | ||
|---|---|---|---|
| 001 | 000000437 | ||
| 005 | 20231201102156.0 | ||
| 008 | 231130s2002 mx a|||||||||||||||||||spa d | ||
| 035 | _aPIM01000000437 | ||
| 040 | _aIngles | ||
| 041 | _aSPA | ||
| 100 | _aAndrade, E. | ||
| 100 | _aMahmood, A. | ||
| 100 | _aMuhl, S. | ||
| 100 | _aZavala, E.P. | ||
| 100 | _aPineda, J.C. | ||
| 100 | _aHuerta, L. | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Fisica | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales | ||
| 222 | 0 | _aSurface and Coatings Technology | |
| 245 | 0 | _aIon beam analysis of SiC/sub x/ thin films using a deuterium beam. | |
| 260 | _b2002. | ||
| 300 | _aVol. 153, pp. 119-124. | ||
| 590 | _aArticulo | ||
| 654 | _aSilicon carbide | ||
| 654 | _aThin film RF | ||
| 654 | _aRBS | ||
| 654 | _aNRA | ||
| 654 | _aCharacterization films | ||
| 856 |
_uhttps://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/2002-18.pdf _yAcceso texto completo |
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| 999 |
_c20474 _d20474 |
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