| 000 | 00850nam a2200253 u 4500 | ||
|---|---|---|---|
| 001 | 000001049 | ||
| 005 | 20231201102300.0 | ||
| 035 | _aPIM01000001049 | ||
| 040 | _aIngles | ||
| 100 | _aBizarro, M. | ||
| 100 | _aAlonso, J. C. | ||
| 100 | _aOrtiz, A. | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales | ||
| 222 | 0 | _aMaterials Science In Semiconductor Processing | |
| 245 | 0 | _aZrAlO ternary oxide as a candidate for high-k dielectrics. | |
| 260 | _b2006. | ||
| 300 | _aVol. 9, no. 6, pp. 1090-1096. | ||
| 590 | _aArticulo | ||
| 654 | _aHigh-k dielectrics | ||
| 654 | _aPyrosol process | ||
| 654 | _aOxides | ||
| 856 |
_uhttps://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/2006-43.pdf _yAcceso texto completo |
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| 999 |
_c21083 _d21083 |
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| 008 | 231130s2006 mx a|||||||||||||||||||spa d | ||