| 000 | 00981nam a2200265 u 4500 | ||
|---|---|---|---|
| 001 | 000001207 | ||
| 005 | 20231201102317.0 | ||
| 035 | _aPIM01000001207 | ||
| 040 | _aIngles | ||
| 100 | _aAlonso, J. C. | ||
| 100 | _aDiaz-Bucio, M. | ||
| 100 | _aOrtiz, A. | ||
| 100 | _aBenami, A. | ||
| 100 | _aCheang-Wong, J. C. | ||
| 100 | _aRodriguez-Fernandez, L. | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales. | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Fisica | ||
| 222 | 0 | _aJournal of Vacuum Science & Technology A | |
| 245 | 0 | _aFluorine content of SiOF films as determined by IR spectroscopy and resonant nuclear reaction analysis. | |
| 260 | _b2007. | ||
| 300 | _aVol. 25, no. 3, pp. 448-454. | ||
| 590 | _aArticulo | ||
| 856 |
_uhttps://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/2007-3.pdf _yAcceso texto completo |
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| 999 |
_c21241 _d21241 |
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| 008 | 231130s2007 mx a|||||||||||||||||||spa d | ||