| 000 | 01195nam a2200313 a 4500 | ||
|---|---|---|---|
| 005 | 20231201102737.0 | ||
| 035 | _aPIM01000003176 | ||
| 040 | _aIngles | ||
| 100 | _aRivera, L. P. | ||
| 100 | _aCamps, E. | ||
| 100 | _aMuhl, S. | ||
| 100 | _aBasurto, R. | ||
| 100 | _aZeinert, A. | ||
| 110 | _aUniversidad Nacional Autonoma de Mexico. Instituto de Investigaciones en Materiales | ||
| 110 | _aInstituto Nacional de Investigaciones Nucleares. Departamento de Fisica | ||
| 110 | _aInstituto Nacional de Investigaciones Nucleares. Laboratoire de Physique de la Matiere Condensee | ||
| 222 | _aMaterials Research Bulletin | ||
| 245 | _aAl-Si-N thin films deposited by laser ablation: effect of plasma parameters on mechanical and optical properties | ||
| 260 | _b2018 | ||
| 300 | _aVol. 99, pp. 306-313 | ||
| 590 | _aArticulo | ||
| 650 | _aAl-Si-N | ||
| 650 | _aThin films | ||
| 650 | _aPulsed laser ablation (PLD) | ||
| 650 | _aComposite hardness | ||
| 650 | _aOptical emission spectroscopy | ||
| 856 |
_uhttps://iim-b.bibliotecas.unam.mx:81/opac-tmpl/bootstrap/images/documentos/articulos/2018-125.pdf _yAcceso texto completo |
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| 999 |
_c23210 _d23210 |
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| 008 | 231130s2018 mx a|||||||||||||||||||spa d | ||