| 000 | 01122nam a2200277zi 4500 | ||
|---|---|---|---|
| 005 | 20230621110701.0 | ||
| 008 | 070920s1992 xxu 000 0 eng | ||
| 020 | _a1558991719 | ||
| 035 | _aMX001000653417 | ||
| 050 |
_aTA418.9S62 _bS53 |
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| 084 | _aSerie | ||
| 245 | 0 | 0 |
_aSmart materials fabrication and materials for micro-electro-mechanical systems : _bSymposium held april 28-30, 1992, san francisco, california, u.s.a. / _cEds., a. Peter jardine... y otros.] |
| 264 | 1 |
_aPhiladelphia, philadelphia : _bMaterials research society, _c1992 |
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| 300 | _a317 páginas | ||
| 490 | 0 |
_aMaterials research society symposium proceedings _v276 |
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| 650 |
_aMateriales inteligentes _vCongresos |
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| 650 |
_aDispositivos electromecanicos _xMateriales _vCongresos |
||
| 650 |
_aMicroelectronica _xMateriales _vCongresos |
||
| 700 |
_aJardine, A. Peter, _eeditor |
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| 710 | 2 | _aMaterials Research Society | |
| 830 |
_aMaterials Research Society symposium proceedings _x 0272-9172 |
||
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c5962 _d5962 |
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