| 000 | 01337nam a2200301zi 4500 | ||
|---|---|---|---|
| 005 | 20230621110759.0 | ||
| 008 | 040830s1995 000 0 eng | ||
| 020 | _a1558992790 | ||
| 035 | _aMX001000725048 | ||
| 050 |
_aTK7874.76 _bA38 |
||
| 084 | _aGeneral | ||
| 245 | 0 | 0 |
_aAdvanced metallization for ULSI applications for 1994 : _bproceedings of the conference held October 4-6, 1994 in Austin, Texas, U.S.A. / _ced., Roc Blumenthal, Guido Janssen |
| 264 | 1 |
_aPittsburgh, Pennsylvania : _bMaterials Research Society, _cc1995 |
|
| 300 | _a564 páginas | ||
| 490 | 0 | _aMaterials Research Society conference proceedings | |
| 500 | _aDocumentos presentados en la Advanced Metallization for ULSI Application Conference--Pref | ||
| 650 |
_aCircuitos integrados _xUltra integración a gran escala _xMateriales _vCongresos |
||
| 650 |
_aGalvanoplastia al vapor _vCongresos |
||
| 650 |
_aMetalización electroquímica _vCongresos |
||
| 700 |
_aBlumenthal, Roc, _eeditor |
||
| 700 |
_aJanssen, Guido, _eeditor |
||
| 710 |
_aUniversity of California, Berkeley. _bContinuing Education in Engineering |
||
| 711 |
_aAdvanced Metallization for ULSI Applications Conference _d(1994 : _cAustin, Texas) |
||
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c7734 _d7734 |
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