| 000 | 01129nam a2200289zi 4500 | ||
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| 005 | 20230621110801.0 | ||
| 008 | 040830s1995 000 0 eng | ||
| 020 | _a1558992901 | ||
| 035 | _aMX001000725742 | ||
| 050 |
_aTK7871.85 _bR345 1995 |
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| 084 | _aSerie | ||
| 245 | 0 | 0 |
_aRapid thermal and integrated processing IV : _bsymposium held April 17-20, 1995, San Francisco, California, U.S.A. / _ceds. Steven R.J. Brueck [y otros] |
| 264 | 1 |
_aPittsburgh, Pennsylvania : _bMaterials Research Society, _cc1995 |
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| 300 | _axiii, 454 páginas | ||
| 490 | 0 |
_aMaterials research society symposium proceedings _v387 |
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| 650 |
_aSemiconductores _xTratamiento termico _vCongresos |
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| 650 |
_aDopado de semiconductores _vCongresos |
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| 650 |
_aDeposición química de vapor _vCongresos |
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| 650 |
_aDielectricos _vCongresos |
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| 700 |
_aBrueck, S. R. J., _eeditor |
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| 710 | 2 | _aMaterials Research Society | |
| 830 | 0 |
_aMaterials Research Society symposium proceedings _x0272-9172 |
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| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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_c7787 _d7787 |
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