| 000 | 01030nam a2200301zi 4500 | ||
|---|---|---|---|
| 003 | $$aDLC | ||
| 005 | 20230621110914.0 | ||
| 008 | 950719s1996 nyua b 001 0 eng | ||
| 020 | _a0195105087 (encuadernado en tela : papel libre de acido) | ||
| 035 | _aMX001000826349 | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 041 | _aENG | ||
| 050 | 0 | 0 |
_aTK7871.85 _bC34 |
| 082 | 0 | 0 |
_a621.3815/2 _220 |
| 084 | _aGeneral | ||
| 100 | 1 |
_aCampbell, Stephen A., _d1954-, _eautor |
|
| 245 | 1 | 4 |
_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell |
| 264 | 1 |
_aNew York : _bOxford University Press, _c1996 |
|
| 300 |
_axv, 536 páginas : _bilustraciones ; |
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| 490 | 0 | _aOxford series in electrical engineering | |
| 504 | _aIncluye referencias bibliograficas e indices | ||
| 650 | 0 |
_aSemiconductores _xDiseño y construcción |
|
| 710 | 2 | _aUniversity of Oxford | |
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c9905 _d9905 |
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